| 摘要 |
<p>A method and apparatus for monitoring a plurality of processes which are identical with respect to at least one process parameter, employing a plurality of sensors each disposed for monitoring the one process parameter of a respective process, the sensors all having identical responses to the one process parameter, by: deriving (2-10) from the sensor responses a succession of response samples each derived from a respective sensor; monitoring each sample in succession and evaluating (18; 28,30; 38,40) a predetermined characteristic of the sensor response represented by each sample, the monitoring step being carried out in a processing path having an input to which all samples are applied in series and providing an output indication of the evaluating result for each sample; and interpreting (52) the indication of the evaluating result of each sample in order to provide an indication of the status of each process.</p> |
