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发明名称
METHOD FOR GROWING SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH04221815(A)
申请公布日期
1992.08.12
申请号
JP19900417803
申请日期
1990.12.21
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
YAMADA TAKESHI;SUGIURA HIDEO;IGA RYUZO
分类号
H01L21/203;H01L21/205
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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