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发明名称
MASK FOR CALIBRATION OF SEMICONDUCTOR WAFER INSPECTING DEVICE WITH PATTERN AND CALIBRATING METHOD FOR INSPECTING DEVICE
摘要
申请公布号
JPH04221839(A)
申请公布日期
1992.08.12
申请号
JP19900405442
申请日期
1990.12.25
申请人
FUJITSU LTD
发明人
NAKAMURA TOMOKO
分类号
G01B11/02;G01R31/28;H01L21/66
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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