发明名称 METHOD AND APPARATUS FOR MEASURING SURFACE OF SUBSTANCE WITHOUT CONTACT
摘要 PURPOSE: To provide a method and an apparatus which guarantee definite absolute distance measurement in the whole measurement region and provide high measurement precision and high measurement speed. CONSTITUTION: A plurality of stripe patterns are successively projected on an object O to be measured, for example, in a time division multioperation manner and phases of the stripe patterns distorted by the object at a picture point are computed by an image processing computer back set and connected with a camera K. At least two frequencies having greatly different effective wavelengths are evaluated in order to expand the measurement region in the camera axial direction. These effective wavelengths are generated by projecting stripe patterns by three projectors P1 , P2 , P3 mutually inclined, for example, at different angles α1 , α2 .
申请公布号 JPH04220509(A) 申请公布日期 1992.08.11
申请号 JP19910043365 申请日期 1991.03.08
申请人 CARL ZEISS:FA 发明人 MIHIYAERU KIYUUHIERU;ARUBUREHITO HOOFU
分类号 G01B11/24;G01B11/25;G01C3/06 主分类号 G01B11/24
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