| 摘要 |
PURPOSE:To continuously inspect a clad state of clad material while being manufactured by a variation of the reflected beam quantity of a laser beam with which an edge of stripe material is irradiated. CONSTITUTION:In the inspection of the clad band used for lead frame material, etc., of a semiconductor integrated circuit, the edge of the stripe material 2 with good electric conductivity is irradiated with the laser beam 5 while passing through the clad band 3 formed by cladding band-shaped base metal 1 and the stripe material 2. The reflected beam is then detected by a photodetector 6. The clad state of the clad band 3 is detected by the variation of a detection symbol for this reflected light quantity. An unclad part 8 of clad band steel thus can be continuously detected in a manufacturing process and the clad band with high reliability can be supplied. |
