发明名称 |
ELECTRICALLY CONDUCTIVE RESIST MATERIAL, A PROCESS FOR ITS PREPARATION AND ITS USE |
摘要 |
An electrically conductive resist material is disclosed, comprising at least one polymer which is sensitive to ionizing radiation and a soluble electrically conductive oligomer or polymer. A process for producing the resist material is also described, comprising admixing an electrically conductive oligomer or polymer dissolved in a solvent to at least one polymer which is sensitive to ionizing radiation. The resist material is useful in preparing electron beam resists which prevent electrostatic charging and resultant electrostatic fields.
|
申请公布号 |
US5137799(A) |
申请公布日期 |
1992.08.11 |
申请号 |
US19900474367 |
申请日期 |
1990.02.02 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
KAEMPF, GUENTHER;FELDHUES, MICHAEL;SCHEUNEMANN, UDE;LINGNAU, JUERGEN |
分类号 |
G03F7/004;C08G61/10;C08G61/12;G03F7/027;G03F7/032;G03F7/038;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|