发明名称 Solution for dissolving noble metal alloys which include tin and re-work method of removing said alloys from a substrate.
摘要 <p>The inventive solution for dissolving metal alloys which include tin comprises (1) KJ in an amount of at least 0.3 moles/liter, (2) J2 an amount of at least 0.195 moles/liter, and (3) halogen ions selected from the group consisting of fluoride, chloride and bromide in an amount of at least 0.3 moles/liter. &lt;??&gt;The solution is used in a rework-method where the substrates are subjected to said solution for removing noble metal alloys containing tin while features formed of refractory metals are retained. </p>
申请公布号 EP0036113(A1) 申请公布日期 1981.09.23
申请号 EP19810101372 申请日期 1981.02.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SCHMECKENBECHER, ARNOLD FRIEDRICH
分类号 H01L23/12;C23F1/14;C23F1/30;H01L21/48;(IPC1-7):23F1/00;01L21/314;01L21/471 主分类号 H01L23/12
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