发明名称 |
Solution for dissolving noble metal alloys which include tin and re-work method of removing said alloys from a substrate. |
摘要 |
<p>The inventive solution for dissolving metal alloys which include tin comprises
(1) KJ in an amount of at least 0.3 moles/liter,
(2) J2 an amount of at least 0.195 moles/liter, and
(3) halogen ions selected from the group consisting of fluoride, chloride and bromide in an amount of at least 0.3 moles/liter.
<??>The solution is used in a rework-method where the substrates are subjected to said solution for removing noble metal alloys containing tin while features formed of refractory metals are retained. </p> |
申请公布号 |
EP0036113(A1) |
申请公布日期 |
1981.09.23 |
申请号 |
EP19810101372 |
申请日期 |
1981.02.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SCHMECKENBECHER, ARNOLD FRIEDRICH |
分类号 |
H01L23/12;C23F1/14;C23F1/30;H01L21/48;(IPC1-7):23F1/00;01L21/314;01L21/471 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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