发明名称 METHOD AND APPARATUS FOR MEASURING SURFACE OF SUBSTANCE IN NON-CONTACT MODE
摘要 PURPOSE: To provide a method and an apparatus which is characterized in that the high measurement precision is provided and that the measurement stability is scarcely affected by outside interferences. CONSTITUTION: Two stripe patterns are projected on an object to be measured by two projectors so installed as to form at least two angles in, for example, a time-division multioperation manner. In this case, the interval cycles in the lattices of the projectors are made equal. The stripe patterns are photographed by a camera 1 and stripe phases ϕ1 , ϕ2 of both of the projectors are computed for every picture point by one of image processing computers 1 positioned behind and connected with the camera and then the stripe phase differences Δϕof both projectors are computed. The phase differences are spatially fixed even in the case that the projectors are moved relative to the camera and added in an image memory 9 for a plurality of video images.
申请公布号 JPH04220510(A) 申请公布日期 1992.08.11
申请号 JP19910043366 申请日期 1991.03.08
申请人 CARL ZEISS:FA 发明人 MIHIYAERU KIYUUHIERU
分类号 G01B11/24;G01B11/25;G01C3/06 主分类号 G01B11/24
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