| 摘要 |
PURPOSE:To obtain an aligner which is able to make both focusing and alignment quickly and simultaneously without using any optical path switching means by appropriately setting elements for focusing and alignment. CONSTITUTION:A focus mark 11b is projected upon the surface of a wafer 13 by means of a projection lens 12. The image of the mark 11b projected upon the surface of the wafer 13 is reflected and again forms the unmagnified image of the mark 13 at the position of the mark 11b on the surface of a reticle 10 after passing through the lens 12. Then the luminous flux formed by the image of the mark 11b is reflected by means of a mirror 3, half mirrors 2 and 4, and a mirror 5 after passing through a light transmissive section and detected by means of a detecting means 6. The position of the wafer 13 is set so that the output signal of the means 6 becomes the maximum by moving an XYZ stage 14 along an optical axis 12a by means of a driving means 102. |
