Method and apparatus for determining the thickness of an interfacial polysilicon/silicon oxide film,申请号US19910690405-传众专利搜索

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发明名称	Method and apparatus for determining the thickness of an interfacial polysilicon/silicon oxide film
摘要
申请公布号	US5138256(A)	申请公布日期	1992.08.11
申请号	US19910690405	申请日期	1991.04.23
申请人	INTERNATIONAL BUSINESS MACHINES CORP.	发明人	MURPHY, RICHARD J.;SCHICK, JEROME D.;WILSON, HOWARD R.
分类号	H01L21/66;G01B7/06;G01B15/02;G01R31/26;G01R31/305	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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