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发明名称
PRODUCTION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH04215455(A)
申请公布日期
1992.08.06
申请号
JP19900410692
申请日期
1990.12.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
SATSUMA KAZUMASA
分类号
H01L21/762;H01L21/31;H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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