| 摘要 |
<p>PURPOSE:To provide a vacuum chuck device which removably holds a thin plate, such as silicon wafer, etc. CONSTITUTION:A porous layer 20 is obtained by uniformly filling up the recessed section of a body which is the main body of a vacuum suction device with coated members 12 which are prepared by coating core members 10 with a coating material 11 having a lower melting point than the core members 10 without gap by making the members 12 to flow in the recessed section and welding the contact sections between the members 12 and between the members 12 and the body 4 to each other. At the time of forming the layer 20, a platy material is put on the suction surface of the body or the suction surface is machined to a flat surface after welding so that the suction surface 13 of the body can become a highly accurate plane.</p> |
