| 摘要 |
<p>PURPOSE:To markedly reduce percent detective by preventing electrification of a semiconductor pellet and electrostatic breakdown of a semiconductor pellet during the washing step. CONSTITUTION:At least one face of an adhesive tape 7 which holds a semiconductor wafer 1 is coated with a conductive member 8. Charges developed in the adhesive tape 7 by washing the semiconductor wafer 1 are eliminated immediately through the conductive member 8; therefore, there is no elimination through the semiconductor wafer 1, so that no electrostatic breakdown of the semiconductor wafer 1 occurs.</p> |
