Evacuation esp. for glass ampoule - using silicone washer for rapid sealing to vacuum line

摘要

(A) In the evacuation of hollow bodies, esp. glass ampoules (2) pref. contg. chemical reagents, which have one end (3) closed and the opposite end (4) connected vacuum-tightly to a vacuum line (6), the novelty is that, before or during evacuation, a sealing washer (8) is applied to the peripheral edge of the open ampoule end (4), the washing being fitted to the vacuum line end and pref. being made of 'rubber/silicone'. (B) The evacuation equipment is also claimed. USE/ADVANTAGE - The process is useful for evacuating quartz glass ampoules contg. chemicals (e.g. GaAs, InP, GaP), opt. prior to sealing. The washer allows immediate sealing of sawn ampoule ends without pretreatment (e.g. welding of vacuum capillaries) so that an optimal vacuum can be applied in a rapid and simple manne