| 摘要 |
PURPOSE: To economically obtain a positive photoresist having good reproducibility and high resolving power by a short-wave UV. CONSTITUTION: This radiation-sensitive mixture consists of a polymer binder composed mainly of novolac base insoluble in water and soluble in an aq. alkaline soln. or a polymer binder mixture, an onium salt generating a strong acid when exposed to radiation and a pyrocatechol derivative suppressing the solubility of the polymer base in the aq. alkaline soln. |
