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发明名称
SEMICONDUCTOR DEVICE AND ITS PRODUCTION
摘要
申请公布号
JPH04215441(A)
申请公布日期
1992.08.06
申请号
JP19900410701
申请日期
1990.12.13
申请人
NEC CORP
发明人
MATSUMOTO HIROSHI
分类号
H01L21/265;H01L21/336;H01L29/78
主分类号
H01L21/265
代理机构
代理人
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地址
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