FILM STRUCTURE AND ITS MANUFACTURE

摘要

PURPOSE:To offer a film structure easily formable with the film of the objective material having a thermal expansion coefficient different from that of a substrate as for the film structure of the substrate and its manufacturing method. CONSTITUTION:In a film structure in which the film of the objective material having a thermal expansion coefficient different from that of a substrate is formed on the substrate, a primary intermediate layer of a material having ductility higher than that of the material of the substrate is interposed between the substrate and the film.