PRESSURE SENSOR AND SEMICONDUCTOR MANUFACTURING DEVICE USING THIS PRESSURE SENSOR,申请号JP19900410488-传众专利搜索

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发明名称	PRESSURE SENSOR AND SEMICONDUCTOR MANUFACTURING DEVICE USING THIS PRESSURE SENSOR
摘要
申请公布号	JPH04215027(A)	申请公布日期	1992.08.05
申请号	JP19900410488	申请日期	1990.12.13
申请人	ANRITSU CORP	发明人	NAITOU YOSHINOBU;KOTADO SETSUO
分类号	G01L21/14;H01L29/84	主分类号	G01L21/14
代理机构		代理人
主权项
地址

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