摘要 |
<p>PURPOSE:To offer the manufacturing method of a resistor, which is superior in noise characteristics, by a method wherein in the resistor being used as resistors, which are used in various electronic equipments, an irregularity in the resistance value at its high-resistance region is solved. CONSTITUTION:A solution obtainable by dissolving a compound containing at least ruthenium in its structure in an organic solvent is applied on an insulating substrate 11, is thermally decomposed in the atmosphere and thereafter, is subjected to firing in an inert atmosphere, whereby a resistor 13 is obtained. As a hydrogen concentration at the time of the firing is microscopic, high degree oxidation of ruthenium oxide is not caused, whereby the volatilization of the ruthenium oxide is inhibited and the ruthenium oxide consisting of conductive particles of an even size is distributed in the resistor 13 in a uniform thickness. Thereby, the resistor is formed into a resistor, which has little irregularity in the resistance value at its high-resistance region and is good in noise characteristics.</p> |