| 摘要 |
PURPOSE:To improve the dielectric constant of a thin film by heating a mixed soln. of an organic metallic compound contg. Pb, Ti and La into a uniform soln., coating a substrate with it, executing baking and forming a thin film having a compsn. in a specified formula. CONSTITUTION:An organic solvent such as methoxyalcohol is mixed with an organic metallic compound such as the acetate of Pb and Ti and the >=C2 alkoxide of La in a prescribed molar ratio, and this mixture is heated to remove water and/or formed alcohol. Next, it is heated and refluxed into a uniform transparent soln., and a substrate of Si or the like is coated with it, and after that, the solvent is removed. Subsequently it is calcined at 500 to 100 deg.C to obtain a dielectric thin film with 0.1 to 2mum film thickness having a Perovskite structure of the compsn. in the formula (5<X<30) and in which a single crystalline phase is formed. |
