发明名称 Process and programmable computer controlled system for electroless copper plating.
摘要 <p>A process for maintaining the level of cyanide ion stabilizer in an electroless copper plating bath held at a constant predetermined temperature by making additions of predetermined amounts of cyanide ion feedstock at predetermined time intervals. The properties of the copper layer deposited on a substrate by means of the system are significantly improved in uniformity and structural strength. In addition, the plating rate and stability of the bath are far more uniform. A programmable computer system for controlling the process of the invention is also described. &lt;IMAGE&gt;</p>
申请公布号 EP0497042(A2) 申请公布日期 1992.08.05
申请号 EP19910310544 申请日期 1991.11.14
申请人 MACDERMID INCORPORATED 发明人 MARTIN, THEODORE A., JR.
分类号 C23C18/40;C23C18/16;H05K3/18 主分类号 C23C18/40
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