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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04213816(A)
申请公布日期
1992.08.04
申请号
JP19910067134
申请日期
1991.03.29
申请人
TOSHIBA CORP
发明人
OKADA TAKAKO;KANBAYASHI SHIGERU
分类号
H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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