发明名称 |
Spin coating apparatus |
摘要 |
The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.
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申请公布号 |
US5134962(A) |
申请公布日期 |
1992.08.04 |
申请号 |
US19900524378 |
申请日期 |
1990.05.16 |
申请人 |
HITACHI, LTD.;CKD CORPORATION |
发明人 |
AMADA, HARUO;KOJIMA, AKIHIRO;KAGOHASHI, HIROSHI;SAKAI, ATSUYUKI;SHIMURA, KATSUMASA;MAEKAWA, HISAMITSU |
分类号 |
G03F7/16;B05C5/00;B05C11/08;B05C11/10;G11B5/842;H01L21/00;H01L21/027;H01L21/30 |
主分类号 |
G03F7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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