| 摘要 |
A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge scanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photoresist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrated with the remainder of an integrated circuit.
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