| 摘要 |
PURPOSE:To form a dense sintered body wherein grain size is small and bores are little, and reduce the thickness of a ceramic layer without decreasing DC breakdown voltage and deteriorating electric characteristics, by baking a ceramic electronic parts having ceramic layers and electrode layer, in a reduced pressure atmosphere lower than the air pressure. CONSTITUTION:A multilayered ceramic capacitor is formed by baking after the necessary number of not-yet-baked ceramic layers 11 and inner electrode layers 21, 22 are alternately stacked and laminated. The baking is performed in a reduced pressure atmosphere lower than the air pressure. The atmosphere is selected in response to metal material constituting the electrode. Any one of the following may be used; air atmosphere, oxygen atmosphere, neutral atmosphere like nitrogen and argon, and reducing atmosphere by CO-CO2 control and H2O-H2 control. Suitable reduced pressure is in the range of 10<-5>-10<-1>(atm), and the temperature ascending rate and the temperature descending rate are set to be, e.g. 300 deg.C/hr. |
