| 摘要 |
PURPOSE:To make it possible to perform easy manufacture by simplification of a structure, by using bellows as a pressure-receiving sealing member, and obtaining the sealing with respect to a base, which supports a casing and a pressure sensitive element through the flange part of the bellows. CONSTITUTION:Bellows C of a sealing member are inserted in a cylindrical casing A. A tubular step part C2 is coupled with the inner surface of the casing A. A flange part C3 is contacted with an opening end part 7 of the casing A. Then, a cylindrical ring 3 of a base B is coupled in the step part C2. A flange part 3a is contacted with C3. The flange part C3 is positioned between the end part 7 and the flange part 3a. In this composite state, ring projection welding is performed from the axial direction of the casing A and the bonding is accomplished. The inside of the bellows C is filled with a pressure transmitting silicone oil 8 before the welding. The pressure of a fluid to be measured is captured as the displacement of the sealing bellows C for pressure receiving, and applied to a semiconductor pressure sensitive element 5. The change in resistance value of the element 5 is measured and the pressure value is detected. |
