| 摘要 |
PURPOSE:To increase the standby ionization electron density so as to increase the output of a laser beam by forming a dielectric to a cylindrical shape and a section facing a main discharge electrode to a plate-like shape and facing an auxiliary electrode to the main discharge electrode. CONSTITUTION:An anode 1 and a cathode 2 are faced to each other. The cathode 2 is formed in a grating- or comb-like shape. The anode 1 is faced to the cathode 2 and a dielectric 3 is arranged on the outside of the cathode 2. The dielectric 3 is provided with a plate-like section having a surface polished to a mirror surface in the direction facing the cathode 2 and formed to an angular pipe. An auxiliary electrode 4 is contained in the dielectric 3 with a space C. When the surface of the plate-like section is polished to a mirror surface, the auxiliary electrode 4 can be closely stuck to the plate-like section. Therefore, the insulating performance can be improved and, in addition, the auxiliary electrode housing process can also be simplified. |
