X-RAYS IMAGE SENSOR AND X-RAYS INSPECTION DEVICE

摘要

PURPOSE:To enable an X-rays image sensor for eliminating an influence of a beam handling and an X-rays inspection device for accurately measuring an amount of substance regardless of a thickness of a specimen. CONSTITUTION:A title item is an X-rays image sensor 6 with a same X-rays absorption coefficient as that of a substance to be measured and where an X-rays incidence surface of a partial unit detection element 22 is covered with a filter 4 whose density and thickness are known. Also, when measuring specimens 7 and 8 by scanning the specimens 7 and 8 using the X-rays image sensor 6, an amount of substance of the specimens 7 and 8 is measured and at the same time that of the filter 4 is measured and a compensation coefficient is obtained from a measured value of the amount of substance of the filter 4 and a true value of physical properties of filter materials, thus enabling the measured value of the amount of substance of the specimens 7 and 8 to be compensated for.