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发明名称
METHOD FOR FORMING PATTERN OF THIN FILM TRANSISTOR
摘要
申请公布号
JPS56122130(A)
申请公布日期
1981.09.25
申请号
JP19800024888
申请日期
1980.02.28
申请人
SHARP KK
发明人
MINEZAKI SHIGEHIRA
分类号
H01L21/30;H01L21/027;H01L21/306;H01L21/336;H01L21/34;H01L29/78;H01L29/786
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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