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发明名称
PRODUCTION OF ALUMINUM NITRIDE SUBSTRATE
摘要
申请公布号
JPH04209766(A)
申请公布日期
1992.07.31
申请号
JP19900337787
申请日期
1990.11.30
申请人
IBIDEN CO LTD
发明人
FUKATSU YASUAKI
分类号
B32B15/04;C04B37/02;C04B41/90;H01L23/12;H05K3/38
主分类号
B32B15/04
代理机构
代理人
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