| 摘要 |
<p>PURPOSE:To obtain a device with low floating quantity and less fluctuations in the floating quantity by integrating a buoyancy adjusting mechanism as a micro-structure whose shape is changed by means of the control of an applied voltage from the outside, and sticking the buoyancy adjusting mechanism to a negative pressure slider together with the substrate. CONSTITUTION:A mobile bridge 22 composed of a mobile electrode 221, an insulating layer 222, a gap 223, and a fixing electrode 224 is formed on a monocrystal Si substrate 20. An air hole 9 is provided on the substrate 20 and the negative pressure slider 1 from the electrode 224. At this constitution, when a dc voltage is applied between the electrodes 221 and 224, the electrode 221 has a deflection deformation by electrostact attracting force, the air hold 9 is blocked, and negative buoyancy is made high. Therefore, the floating quantity detected by a floating quantity measuring device 3, the dc voltage is controlled according to the difference of the detected quantity and a prescribed floating quantity, to adjust the floating quantity. Thus, the floating quantity can be made low and simultaneously, its fluctuations are reduced.</p> |
