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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04208528(A)
申请公布日期
1992.07.30
申请号
JP19900400147
申请日期
1990.12.03
申请人
NEC CORP
发明人
OKAMOTO TETSUMASA
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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