| 摘要 |
PURPOSE:To remarkably reduce the operating duty of a switch and to improve energy density to be injected to a glow discharge by setting the opposed length between main electrodes to a predetermined length, and emitting a short wavelength light between the main electrodes from a predetermined direction. CONSTITUTION:When opposed length of main electrodes 1, 2 is so set to the surface length B of the same direction as that of laser gas flow of the electrodes 1, 2 as to be A<1/2.B, a discharge length between the electrodes 1 and 2 is shortened to improve stability of a glow discharge. The electrodes 1, 2 are preliminarily ionized by emitting an X ray 12 of a direction perpendicular to the longitudinal direction of the electrodes 1, 2 from an X-ray source, uniformity of the discharge is enhanced, and energy density to be injected to the discharge is enhanced. On the other hand, a discharge starting time is controlled by the X-ray 12 to enhance a discharge breakdown voltage per unit length is enhanced, and a discharge impedance can be enhanced. The X-ray source is provided externally to remarkably reduce the operating duty of a switch 7. Thus, a pulse laser oscillator having a high efficiency, a long life is provided. |
