| 摘要 |
<p>PURPOSE:To obviate the need for using other liquefied gases exclusively designed for cooling liquid nitrogen or the like as a cooling medium by using liquefied gas of a gas material itself to be used for ambient control service as a cooling medium which refines at low temperature the waste gas of super low boiling point gas used for ambient control service. CONSTITUTION:Ar waste gas is introduced into a low temperature condensation tank 4 for a low temperature refinement device 3 by way of a valve 16 and a pipeline 2 where the impurities of easily condensable and solidified gas whose boiling point is relatively low, such as H2O, CO2 or the like are separated form the gas, and introduced into a low temperature adsorption tank 5 which allows N2, and O2 or the like contained in the Ar gas to be adsorbed into an adsorbent 6, such as synthetic zeolite. As a cooling medium, liquid Ar 8 is supplied to a cooling jacket which cools the low temperature condensation tank 4 and the low temperature adsorption tank 5 from a liquid Ar storage tank 9 by way of a valve 18 and a pipeline 10. The Ar gas which has passed through the low temperature adsorption tank 5 and purified and refined, is introduced into a pipeline 13 by way of a pipeline 11 and a valve 17 and supplied again into a sappier single crystal growth furnace 1 by way of a valve 15. The gasified gas of the liquid Ar which is a cooling medium in the cooling jacket 7 is introduced into a pipeline 13 by way of a valve 19 and a pipeline 12 where it joins the Ar gas which is refined and collected from the Ar waste gas.</p> |
