Prodn. of yttrium-contg. high temp. superconductors - by introducing yttrium by evapn. from yttrium oxide vessel in oxygen@-contg. atmos. and depositing on substrate,申请号DE19914134984-传众专利搜索

发明名称	Prodn. of yttrium-contg. high temp. superconductors - by introducing yttrium by evapn. from yttrium oxide vessel in oxygen@-contg. atmos. and depositing on substrate
摘要	Layers of Y-contg. high temp. superconductors are produced by introducing yttrium and other metals into appropriate heat resistant evapn. vessels; evaporating these by heating in an O2-contg. atmos.; and depositing the resulting reaction prod. on a substrate. The improvement is that Y is evapd. from an evapn. vessel which comprises Y oxide. Pref. the other metals are Ba and Cu and the evapn. vessel for the other metals comprises B nitride. Pref. the evapn. is conducted in an O2 atmos. having an O2 pressure of 10 power (-2) Pa (10 power (-4) mbar) max. ADVANTAGE - New process guarantees well controllable and stable evapn. ratios and avoids troublesome contaminant
申请公布号	DE4134984(C1)	申请公布日期	1992.07.30
申请号	DE19914134984	申请日期	1991.10.23
申请人	MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV, 3400 GOETTINGEN, DE	发明人	DIETSCHE, WERNER, DR., 7043 GRAFENAU, DE;WANG, HUI-SHENG, 7000 STUTTGART, DE;EISSLER, DIETER, 7410 REUTLINGEN, DE;KERSHAW, YVONNE, BOURNHEATH, BROMSGROVE, WORCESTERSHIRE, GB;BRUNNER, DIETER, DR., 8589 BINDLACH, DE;GOETZ, ULRICH, 8959 BUCHING, DE
分类号	C23C14/24;C30B23/02;H01L39/24	主分类号	C23C14/24
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