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发明名称
CHARGED PARTICLE ANALYZER
摘要
申请公布号
EP0268232(B1)
申请公布日期
1992.07.29
申请号
EP19870116800
申请日期
1987.11.13
申请人
SHIMADZU CORPORATION
发明人
DAIMON, HIROSHI;INO, SHOZO
分类号
G01Q60/20;G01Q70/10;H01J49/44;H01J49/48
主分类号
G01Q60/20
代理机构
代理人
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