发明名称 Method of making a structured design using high-temperature superconducting material.
摘要 A structured layer (12b) is to be produced by the method from a predetermined material with at least one recess (7) on a substrate (2), if necessary structured, using a high-temperature superconducting material. According to the invention, a lacquer layer soluble in a first solvent and having a structure corresponding to that of the layer (12b) to be produced is first applied to the substrate (2). An auxiliary layer, soluble in a second solvent, is then cold-deposited. The lacquer layer with the portion of the auxiliary layer which lies on it is then removed again by a lift-off technique by means of the first solvent, and the remaining construction is provided at an elevated deposition temperature with a coating layer of the material of the layer (12b) to be produced. Finally, the remaining portion of the auxiliary layer in the region of the recess (7), with the portion of the coating layer which lies on it, is removed by a lift-off technique by means of the second solvent. <IMAGE>
申请公布号 EP0496215(A2) 申请公布日期 1992.07.29
申请号 EP19920100278 申请日期 1992.01.09
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 ROAS, BERNHARD, DR.
分类号 H01L39/24 主分类号 H01L39/24
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