发明名称 ELECTROSTATIC ATTRACTION DEVICE
摘要 <p>PURPOSE:To enable a separating operation of a body to be attracted to be performed easily and obtain a device with a large attraction force by applying a polyphase AC voltage in at least three phases where a frequency is below a specified value to a plurality of electrodes forming an electrostatic attraction force for attracting the body to be attracted through a dielectric. CONSTITUTION:In an electrostatic attraction device with a support 1 where a surface 1a which should contact a body to be attracted 8 is constituted by a dielectric 3 and a plurality of electrodes 2a-2c forming an electrostatic attraction force for attracting the body to be attracted 8 through the above dielectric 3 which are provided at the support 1, a polyphase in at least three phase AC voltage with a frequency of 1Hz or less is applied to the above plurality of electrodes 2a-2c. For example, three electrodes 2a-2c which are formed in wedge shape are combined in circular shape as a whole and are placed within the main body of the device 1 which consists of an insulation material such as alumina or silicon rubber and is a support formed in disc shape. Then, the electrodes 2a-2c are connected to electrodes 5a-5c through an electrode terminal 4.</p>
申请公布号 JPH04206754(A) 申请公布日期 1992.07.28
申请号 JP19900335669 申请日期 1990.11.30
申请人 TOKYO ELECTRON LTD 发明人 HONGO TOSHIAKI
分类号 H01L21/683;H01L21/68 主分类号 H01L21/683
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