| 摘要 |
<p>PURPOSE:To enable a separating operation of a body to be attracted to be performed easily and obtain a device with a large attraction force by providing a plurality of electrodes where a polyphase AC voltage is applied to and an insulation layer consisting of a ceramic in a specific thickness which is provided so that it is included between those electrodes and the body to be attracted. CONSTITUTION:In an electrostatic attraction device for performing electrostatic attraction of a body to be attracted 7, a plurality of electrodes 2a-2c where a multiple-phase AC voltage is applied to and an insulation layer 3 which is provided so that it is included between those electrodes 2a-2c and the body to be attracted 7 and consists a ceramic with a thickness of 5-500mum being coated by the CVD method, the PVD method, or the ion plating method are provided. For example, three electrodes 2a-2c which are formed in wedge shape are combined in circular shape as a whole and are placed on a substrate 1 which consists of silicon rubber, etc., and is formed in disc shape. Then, the insulation layer 3 with a thickness of 30mum consisting of an intricate alumina ceramic coated by the CVD method is provided on an upper surface of those electrodes 2a-2c.</p> |
