| 摘要 |
A substrate-heating device and a boat structure for a vacuum depositing apparatus that is capable of depositing semiconductor film onto a substrate more uniformly. The substrate-heating device includes a plurality of divided heating blocks which are capable of detecting and controlling their respective temperatures separately and independently. The substrate-heating device further includes a plurality of substrate holders for holding substrates, these substrate holding being driven by motor, through a transmission gear, a plurality of divided heating blocks for heating substrates, and boat structure for evaporating the depositing material within a vacuum chamber. The heating blocks, except a top portion, are structured with C-G heaters, ceramic tubes, heat-conductive protecting support plates and heat-radiating conductive plate, as well as thermocouples, so that temperature differences among each portion of the heating blocks can be controlled separately and independently so that more uniform depositing of semiconductor film onto the substrates can be obtained.
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