| 摘要 |
<p>PURPOSE:To achieve a highly accurate alignment of position of two components by detecting a relative positional deviation of two components by positioning a detection device with a detection port at upper and lower parts between two components with one component being transported to upper or lower part of the other component. CONSTITUTION:By transporting one component 2 to upper or lower part of the other component, a pattern of two components 2 and 1 is detected. Then, positions of two components 2 are aligned in reference to either one parts based on the detection result, and then two parts 2 and 1 whose position is aligned are bonded. In such bonding method, while one parts 2 is transported to upper or lower portion of the other parts 1, the above detection process allows a detection device 10 with detection parts 16A and 16B on the upper and lower portions to be positioned between the above two parts 2 and 1, thus enabling a relative positional deviation between two parts 2 and 1 to be detected. For example, the above detection device 10 is mounted to an XY stage 13 which can be moved in X and Y directions.</p> |
