| 摘要 |
Apparatus for transporting substrates 22, 23 in vacuum deposition systems with several stations, comprising plate-like substrate holders 16 which are moved across the stations in a vertical position along a given path and have two rails which interact with two rows of rollers provided underneath the substrate holders. The side of the first rail 13 facing away from the substrate holder 16 has a longitudinal groove 13a which interacts with rollers 7, 7', 7'', . . . which are rotatably disposed at the frame 4 of the apparatus and disposed in a first row where they are spaced apart. The second rail 14 runs parallel to the first one and has a planar bearing surface 14a the plane E2 of which intersects the rotating axes Va of the first row at a right angle and approximately traverses the center of gravity S of the substrate holder 16. The bearing surface 14a interacts with S rollers 8, 8', . . . which are disposed in a second row and at the bottom of the frame 4 where they rotate around vertical axes 1a. A vertical plane E1 in the longitudinal groove 13a of the first rail 13 is laterally offset with respect to plane E2 of the planar bearing surface.
|
