SURFACE TREATMENT APPARATUS,申请号JP19900337333-传众专利搜索

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发明名称	SURFACE TREATMENT APPARATUS
摘要
申请公布号	JPH04206714(A)	申请公布日期	1992.07.28
申请号	JP19900337333	申请日期	1990.11.30
申请人	SHINKO ELECTRIC CO LTD	发明人	SAKAKIBARA ATSUYUKI;WAKASHIRO AKIYOSHI
分类号	C23C16/44;H01L21/205;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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