| 摘要 |
<p>PURPOSE:To conduct brushing of the suction surface of a vacuum chuck, while subsequently rotating, when the vacuum chuck is driven to ratate, a brush in the same direction as the rotating direction of the vacuum chuck by setting the rotation center of circular brush to the eccentricity position of the vacuum chuck. CONSTITUTION:A rotary drive shaft 6 is rotated to stop a vacuum chuck 9 at the upper predetermined position of a cleaning part 5. Next, the vacuum chuck 9 is moved downward with its suction surface being placed contact with a brush 15, causing the brush 15 to subsequently rotate by rotatably driving the vacuum chuck 9. Simultaneously, the cleaning solution such as pure water is injected from a nozzle 16 for the purpose of cleaning. Namely, since the rotation center of brush 15 is set to the eccentricity position of the vacuum chuck 9, when the vacuum chuck 9 is driven to rotate, the outer side of brush 15 being contact with the external circumference of the vacuum chuck 9 receives a larger friction force than that at the internal side thereof being contact with the internal circumference thereof, because the velocity becomes faster when it goes to the outer side. Accordingly, the brush 15 is subsequently rotated in the same direction as the rotating direction of the vacuum chuck 9 for the brushing purpose.</p> |
