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发明名称
SUSCEPTOR TEMPERATURE EQUALIZING METHOD
摘要
申请公布号
JPH04206943(A)
申请公布日期
1992.07.28
申请号
JP19900338574
申请日期
1990.11.30
申请人
KYUSHU ELECTRON METAL CO LTD;OSAKA TITANIUM CO LTD
发明人
ADACHI HISASHI;HORAI MASATAKA;MATSUDA MASAHIKO
分类号
G01R31/26;H01L21/205;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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