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发明名称
MANUFACTURE OF MULTILAYER FILM MIRROR USED IN VACUUM ULTRAVIOLET REGION
摘要
申请公布号
JPH04204603(A)
申请公布日期
1992.07.27
申请号
JP19900334630
申请日期
1990.11.30
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
MATSUKI NOBUO
分类号
G02B5/08;B32B15/08
主分类号
G02B5/08
代理机构
代理人
主权项
地址
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