发明名称 LITHIUM NIOBATE SINGLE CRYSTAL THIN FILM
摘要 PURPOSE:To form a material which is suitable for the constitution material of a thin film type waveguide type SHG element and can be sufficiently used as light modulator and an optical device in multimode by forming the lattice matching of a lithium niobate single crystal thin film with a lithium tantalate substrate. CONSTITUTION:A mixture consisting of 22mol% Na2CO3, 28mol% Li2CO3, 40mol% V2O5, 10mol% Nb2O5, and MgO is added by 2mol% into a theoretical quantity of LiNbO3 which can be precipitated from a fused body composition, and the mixture is heated to 1100 deg.C in an epitaxial growth breeding device under the air environment, and the contents in a crucible is molten, and further stirred for 12 hours. Then, the 0001 plane of a lithium tantalate single crystal having a thickness of 2mm is optically polished, and the chemical etching is carried out, and chamferring is carried out. After the molten body is gradually cooled to 915 deg.C, a substrate is preliminarily heated at 915 deg.C for 30min, and immersed into the fused body for 8min. through revolution. The substrate member is pulled up from the molten liquid, and after the molten body is shaken out on a molten body, gradually cooled to the room temperature, and a single crystal thin film which is made of lithium niobate containing sodium and magnesium and has a thickness of about 8mum is prepared on the substrate member.
申请公布号 JPH04204525(A) 申请公布日期 1992.07.24
申请号 JP19900330262 申请日期 1990.11.30
申请人 IBIDEN CO LTD 发明人 ONO TETSUSHI
分类号 G02F1/35;C30B19/02;C30B29/30;G02B6/12;G02F1/355;G02F1/365;G02F1/377 主分类号 G02F1/35
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