| 摘要 |
PURPOSE:To provide applicability for analysis of an element of fine amount and analysis of a light element of low detection efficiency while reducing attenuation of X-ray intensity in an X-ray detection surface by inserting a hollow fine X-ray guide pipe interposed between an X-ray generating source and a detector. CONSTITUTION:X-rays 2, generated from an X-ray generating device l, are irradiated to an opposedly provided sample 3, and fluorescence X8, generated from the sample 3, is guided to an X-ray detector 7 through an X-ray guide pipe 5. As the detector 7, an Si semiconductor detector, having energy resolution, and a gas flow type proportional counter are used. An amount of the fluorescence X-rays 8 is incident upon the detector 7 as a total amount of X-rays of direct fluorescence X-ray light and X-rays fully reflected by an internal wall of the hollow fine X-ray guide pipe 5, and X-ray intensity is in inverse proportion to a square of a distance between an X-ray generated position and a detection surface of the detector 7, so that the closer to a generating source of the fluorescence X-ray is a point end of the X-ray guide pipe 5 the larger the X-ray intensity is increased. |
