| 摘要 |
PURPOSE:To obtain the temperature characteristic in a wide range by bonding a driving piezoelectric bimorph element and a detecting piezoelectric element to be orthogonal to each other, thereby constituting a sensor element, and providing the bimorph element with a signal leading electrode and an intermediate earthing electric light pole. CONSTITUTION:A piezoelectric element 1 for detecting purpose and a piezoelectric bimorph element 12 for driving purpose are bonded to be approximately orthogonal to each other via a bonding member 2, thereby constituting a sensor device. A driving electrode 7 provided outside the device 12 and a driving electrode 14 inside tone device 12 are electrically connected by a conductive paste 15. An insulating material 16 insulates the paste 15 from an intermediate electrode 11 and a signal leading line 8. The electrode 11 is electrically connected to an elastic coupling member 4 by the paste 15, and earthed. Accordingly, since the potential between the signal leading line 8 and the electrode 11 is not present, the accumulation of part of the charges generated by the element 1 is prohibited. Even when the capacity is changed due to the temperature change, tone angular velocity sensor can generate stable outputs. |
