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发明名称
AETZLOESUNG FUER NASSCHEMISCHE PROZESSE DER HALBLEITERHERSTELLUNG
摘要
申请公布号
DE4101564(A1)
申请公布日期
1992.07.23
申请号
DE19914101564
申请日期
1991.01.21
申请人
RIEDEL - DE HAEN AG, 3016 SEELZE, DE
发明人
LEIFELS, JOACHIM, 3007 GEHRDEN, DE;SIEVERT, WOLFGANG, DR., 3050 WUNSTORF, DE
分类号
H01L21/308;C23F1/20;H01L21/306;H01L21/311;H01L21/3213
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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